The semiconductor industry is changing rapidly. New materials and advanced production processes need advanced and innovative metrology solutions. Stay up to date with the latest trends in metrology, courtesy of the professionals of AMS. Come talk with us at one of these industry events, and let our information be your edge! 02/01/2005 Philips AMS Licenses Thin Film Infrared Technology from MKS Instruments to Expand Metrology Offerings Licenses High Speed Infrared Thin Film Technology to Address Emerging High Volume Semiconductor Metrology Challenges NATICK, Mass., February 1, 2005 Royal Philips Electronics (NYSE: PHG) today announced that its metrology business unit, Philips Advanced Metrology Systems, Inc. (Philips AMS), has signed a long-term exclusive licensing agreement with MKS Instruments, Inc., (Nasdaq: MKSI), a leading provider of process control products, for use of MKS’ proprietary high speed infrared thin film metrology technology. Under the terms of the agreement, Philips AMS will license the MKS model-based infrared thin film technology and incorporate it into Philips’ existing Series 2000 and 3000 fully automated wafer metrology platforms. The agreement demonstrates Philips AMS’ ability to execute on its core strategy of broadening its product portfolio to include a range of unique and enabling technologies that can be utilized by leading semiconductor fabs worldwide. Utilizing the new technology, Philips AMS plans to develop a series of leading thin film products. The first market for this technology will be online metrology in the area of high volume DRAM manufacturing. "Philips AMS will continue to seek out proprietary and enabling production metrology technologies that will allow us to provide a competitive advantage to our global customers," said Bill Gately, General Manager, Philips AMS. "In working with our customers, we have identified new metrology opportunities driven by emerging applications and techniques, such as MKS’ model-based infrared technology. The licensed technology complements our SurfaceWave‘ advanced copper/low-k metrology product line. Today’s agreement significantly expands our metrology solutions portfolio and broadens our customer base, especially in the high volume DRAM market, where manufacturers face increased challenges." "The model-based infrared technique has a proven track record for process control in semiconductor and optoelectronics manufacturing, and we are excited to announce the technology agreement with Philips AMS to address emerging high volume semiconductor metrology challenges," said Dr. John A. Smith, Vice President and Chief Technology Officer, MKS Instruments. Philips AMS delivers the world's most advanced online metrology solutions, purpose-built to help semiconductor manufacturers solve the challenges inherent in emerging copper/low-k processes. The Series 3300 is a next-generation production system that leverages patented SurfaceWave™ technology to deliver high-throughput, low cost of ownership (COO), non-contact, non-destructive measurements of thickness and uniformity of metal line arrays and pads for all copper/low-k process metrology for 200 mm and 300 mm wafers. About MKS MKS Instruments is a leading worldwide provider of process control solutions for advanced manufacturing processes such as semiconductor device manufacturing and thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products. We also provide technology for medical imaging equipment. Our instruments, components and subsystems incorporate sophisticated technologies to power, measure, control and monitor increasingly complex gas-related semiconductor manufacturing processes, thereby enhancing our customers' uptime, yield and throughput, and improving their productivity and return on invested capital. About Royal Philips Electronics Royal Philips Electronics of the Netherlands (NYSE: PHG, AEX: PHI) is one of the world's biggest electronics companies and Europe's largest, with sales of EUR 30.3 billion in 2004. With activities in the three interlocking domains of healthcare, lifestyle and technology and 161,500 employees in more than 60 countries, it has market leadership positions in medical diagnostic imaging and patient monitoring, color television sets, electric shavers, lighting and silicon system solutions. News from Philips is located at www.philips.com/newscenter Contact: C.J.L. Moore AMS (508) 647-1145 cjl.moore@advancedmetrologysystems.com Contact: Alicia Libucha Lois Paul & Partners, LLC (781) 782-5703 alicia_libucha@lpp.com back to news >