The semiconductor industry is changing rapidly. New materials and advanced production processes need advanced and innovative metrology solutions. Stay up to date with the latest trends in metrology, courtesy of the professionals of AMS. Come talk with us at one of these industry events, and let our information be your edge! 07/12/2005 Philips Advanced Metrology Systems Launches IR3000 MBIR Tool for Use in High Volume Production IC Manufacturing Provides High Throughput, Low COO Measurements of Thickness, Composition and CD on Silicon and Interconnect Layers NATICK, Mass. and SAN FRANCISCO, SEMICON WEST, July 12, 2005 Royal Philips Electronics (NYSE: PHG) today announced that its metrology business unit, Philips Advanced Metrology Systems, Inc. (Philips AMS), has released the IR3000, a Model-based Infrared Reflectance (MBIR) metrology solution for on-product measurements. The new IR3000 broadens Philips AMS’ product portfolio to include high volume measurements of silicon and interconnect layers and structures used in integrated circuit (IC) manufacturing. The adoption of more complex geometric structures and chemically sophisticated materials in the fabrication of integrated circuits, such as trench DRAM, copper/low-k interconnects, and ultra shallow junctions has created an industry need for enhanced low cost-of-ownership (COO) production metrology with sensitivity to structure, chemistry and material properties. As sub-90 nm technologies move to production, the introduction of new materials and structures present complicated chemical and dimensional measurement and control challenges that exceed the capabilities of today’s metrology products. The new Philips AMS IR3000 product combines a powerful new measurement technology with a high throughput, production-proven platform designed specifically to meet the emerging materials and process challenges driven by demanding industry requirements. The IR3000 implements unique, patented MBIR technology to deliver high throughput, low COO, non-contact, non-destructive measurements of the thickness, etch depth, composition and uniformity of dielectric layers and structures used in integrated circuit (IC) manufacturing. The IR3000 provides unmatched performance in terms of precision, accuracy, tool matching and throughput. The IR3000 is ideal for a number of process applications ranging from HART trench depth, bottle trench measurement, dielectric layer thickness and composition, epitaxial and SOI layer thickness and low-k composition. Key features of the IR3000 include: Scalable measurements at the 130 nm node and below; Compatible with all low-k dielectrics; High throughput measuring up to 75 wafers per hour single point or 45 wafers per hour on five sites with pattern recognition; Available in 200mm, 300mm or 200/300mm bridge configurations; and Windows-based software with rich menu driven recipe selection/generation. "Semiconductor materials and processes are becoming increasingly demanding, and metrology requirements of IDM’s have become more challenging. Traditional measurement tools have proven unable to provide rapid and reliable measurements for high volume production lines," said Bill Gately, General Manager, Philips AMS. "The IR3000 provides a unique and enabling model-based IR technology mounted within our proven 200/300mm production platform that is currently in high volume production use by semi manufacturers around the world. In the DRAM market, the IR3000 has been introduced to accurately measure deep trenches including bottle trenches with very high aspect ratios offering IDM’s a unique capability to measure these structures and improve yields." Philips AMS delivers the world's most advanced online metrology solutions, purpose-built to help semiconductor manufacturers solve the challenges inherent in emerging copper/low-k processes. Its flagship Series 3300 Product is a next-generation production system that leverages patented SurfaceWave™ technology to deliver high-throughput, low cost of ownership (COO), non-contact, non-destructive measurements of thickness and uniformity of metal line arrays and pads for all copper/low-k process metrology for 200 mm and 300 mm wafers. About Royal Philips Electronics Royal Philips Electronics of the Netherlands (NYSE: PHG, AEX: PHI) is one of the world's biggest electronics companies and Europe's largest, with sales of EUR 30.3 billion in 2004. With activities in the three interlocking domains of healthcare, lifestyle and technology and 161,500 employees in more than 60 countries, it has market leadership positions in medical diagnostic imaging and patient monitoring, color television sets, electric shavers, lighting and silicon system solutions. News from Philips is located at www.philips.com/newscenter Contact: C.J.L. Moore AMS (508) 647-1145 (781) 782-5703 cjl.moore@advancedmetrologysystems.com Contact: Alicia Libucha Lois Paul & Partners, LLC (781) 782-5703 alicia_libucha@lpp.com back to news >