| 07/12/2005 |
| Advanced Metrology Systems Adds Advanced Automation Software to Its Series 3000 Products |
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Fully E84-Compliant Software Helps Semiconductor Manufacturers Automate High-volume Wafer Manufacturing
NATICK, Mass. and SAN FRANCISCO, SEMICON WEST, July 12, 2005
Royal Philips Electronics (NYSE: PHG) today announced that its metrology business unit, Philips Advanced Metrology Systems, Inc. (Philips AMS), has integrated new advanced process automation software into its 3000 platform of metrology tools. The new software will enable semiconductor manufacturers to implement Philips AMS’ 300 mm metrology tools into an automated, high-volume wafer fab faster with less integration time. The PEER Group Inc., Philips’ equipment automation and data management technology partner, implemented its PEER Tool Orchestrator (PTO) automation backbone along with Asyst’s ConX300 connectivity application for use in Philips AMS Series 3000 and the new IR3000. Customers around the globe are currently using the new software in their fully-automated manufacturing lines.
The successful implementation of advanced process control (APC) requires the acquisition and processing of large amounts of data in real time. To generate this amount of data, device manufacturers need to implement high-throughput metrology solutions that can measure, analyze and forward large amounts of data in real time for use in process adjustments. One of the challenges has been integrating new manufacturing equipment with fully-automated overhead transport (OHT) fabs. The new Philips AMS software ensures that its metrology tools will be able to effectively interact with a customer’s fully-automated host system while providing the fast, reliable measurements needed for APC.
"As the industry becomes more automated and focused on improving yield, the need for scalable software integration becomes imperative," said Bill Gately, General Manager of Philips AMS. "Our customers are very excited about this new software capability, as it will allow them to better integrate our metrology into their APC strategies and improve the automation of their 300 mm fabs. Both our Series3000 and IR3000 customers have already seen significant benefits in their use of the software including fabs with E84-compliant overhead transport system integration. The new E95-based software has resulted in significantly faster system integration times and overall lower COO."
"By partnering with Philips AMS early in the tool design, we were able to leverage our PTO automation software and expertise with Philips AMS’ core competence in metrology and analysis," said Robert Harris, president of PEER Group. "The result is equipment with superior performance in both semiconductor processing and automated manufacturing."
The new software is available on Philips AMS’ 3000 platform suitable for high volume manufacturing applications on patterned wafers and incorporates either the Philips AMS SurfaceWave™ technology or a model-based infrared (MBIR) technology. SurfaceWave, used in the Series 3300, is a non-contact, laser-based technique that provides rapid measurement of thickness on blanket and patterned metal films, providing timely information for the control of copper-based processes. The MBIR reflectance technology uses a model-based IR measurement for the thickness and uniformity of dielectric layers and structures used in IC manufacturing.
About Royal Philips Electronics
Royal Philips Electronics of the Netherlands (NYSE: PHG, AEX: PHI) is one of the world's biggest electronics companies and Europe's largest, with sales of EUR 30.3 billion in 2004. With activities in the three interlocking domains of healthcare, lifestyle and technology and 161,500 employees in more than 60 countries, it has market leadership positions in medical diagnostic imaging and patient monitoring, color television sets, electric shavers, lighting and silicon system solutions.
News from Philips is located at www.philips.com/newscenter
Contact: Steve Kohnle
AMS
(508) 647-1149
steve.kohnle@advancedmetrologysystems.com
Contact: C.J.L. Moore
AMS
(508) 647-1145 (781) 782-5703
cjl.moore@advancedmetrologysystems.com
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