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Emerging from the Massachusetts Institute of Technology in the mid-1990s, our predecessor company, Active Impulse Systems, was assigned a number of MIT patents for measurement technology that could be applied to the semiconductor industry.
Recognizing its commercial potential, Philips Analytical, a division of the well known global brand, purchased the company, which at that time concentrated on metal film measurements as well as opto-acoustic technology. When Philips sold the Analytical division in 2002, it retained Philips Advanced Metrology Systems as a separate business.
In 2003, the company was well on its way to perfecting an opto-acoustic technology to measure the thickness and uniformity of thin film metals and dielectrics in a copper, low k environment. The AMS 3300 product was added to Tier 1 fabrication plants, and its installed base continues to grow.
As the company worked with leading fabs, it evaluated other
technologies for application to the specialized materials used in
semiconductors. By 2005, AMS licensed a promising model-based infrared
reflectometry technology from MKS Instruments, and developed a unique
metrology approach to MBIR that has now become the gold standard for
measuring deep trench structures in DRAM.
With continued and rapid development of both metrology technology and the number of applications for its technologies, it became evident that company growth would be facilitated by a spin-off. In the summer of 2006, Philips sold what is now Advanced Metrology Systems, LLC to JHW Greentree Capital, LP, a private equity fund affiliated with J.H. Whitney & Company. Recognizing the continued potential for success, Philips retained a 19.9% interest in the company.
Advanced Metrology Systems, LLC
Advanced Metrology Systems, LLC is poised to continue to grow by serving a select group of semiconductor manufacturers who benefit by the development of high-throughput, production-ready, inline, APC-enabled metrology solutions. These solutions result from the consultative collaboration of metrology provider and fab, working together toward the common goal of increased yield and higher semiconductor quality.
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